New Spare Parts & Refurbished Parts

We specialize in providing high-quality spare parts for semiconductor manufacturing equipment to ensure uninterrupted production and optimal performance. Our inventory is designed to meet the diverse needs of the semiconductor industry.

Wafer Handling Components

  • Wafer chucks, carriers, and transfer arms
  • End effectors for robotic handling systems

Deposition System Components

  • Heater modules, crucibles, and filaments
  • Target materials for PVD, CVD, and ALD systems

Vacuum System Parts

  • Vacuum pumps, seals, and O-rings
  • High-purity fittings and connectors

Sensors and Electronics

  • Temperature, pressure, and flow sensors
  • Control boards and power supplies

Plasma and Etching Equipment Parts

  • RF generators, electrodes, and cathodes
  • Gas distribution manifolds and showerheads

Filters and Consumables

  • Gas and liquid filters for contamination control
  • Quartzware, ceramic components, and cleaning kits